The Forgotten Story of How IBM Invented the Automated Fab
The Project SWIFT fabrication line was based on sectors, as shown in this patent diagram of the system from 1973. Each sector contained in an enclosure all of the wafer-processing equipment needed to accomplish a segment of the fabrication process between lithographic-pattern exposures.
IBM/U.S. Patent and Trademark Office
In 1970, Bill Harding envisioned a fully automated wafer-fabrication line that would produce integrated circuits in less than one day. Not only was such a goal gutsy 54 years ...
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