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Pulsed Laser Deposition at Wafer Level Is a Game Changer - EE Times

For a technology to have a broad impact, it should do more than solve a short-term challenge; it should also go beyond the advancement of existing technologies to open the doors to future innovations. That’s how we describe the world’s first pulsed laser deposition (PLD) technique for semiconductor mass production, which was unveiled by Lam Research earlier this year. Marking an evolutionary shift in the way thin films can be deposited on a wafer, Lam’s Pulsus PLD expands the range of complex mu...

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