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ASML Aims for Hyper-NA EUV, Shrinking Chip Limits - EE Times

ASML has again announced plans for a new lithography tool that will extend design limits for the highest transistor-density chips. The company’s former president, Martin van den Brink, surprised experts with the announcement of the new “Hyper-NA” EUV technology that is still in the early stages of development, according to global R&D organization imec, which has worked closely with ASML. Hyper-NA would follow the High-NA systems that ASML installed early this year for the first time at an Intel ...

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