A Kinematically Coupled, Nanometer-Resolution Piezo Focus Stage « bunnie's blog
This post is part of a series about giving users a tangible reason to trust their hardware through my IRIS (Infra-Red, in-situ) technique for the non-destructive inspection of chips. Previously, I discussed the process of designing the IRIS light source in some detail, as well as my methodology for learning new things.
This post will describe the focus stage for IRIS.
The focus stage is the thing at the bottom of the above image, covered in a black foil and with red and black wires coming out of...
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